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We present the microfabrication and characterization of an AFM-tip like device with integrated gas delivery microchannel for the generation of localized microplasmas. The device plasma is generated within a submicron region around its tip for direct-write micro and nanofabrication. The device is fabricated by forming a tall, sharp micromolded gold tip in a KOH etched inverted pyramid followed by thermo-compression...
This paper presents a new technique for the fabrication of high resolution non-planar precision microshells for hemispherical resonating gyros via a poached-egg micromolding (PEM) method. In PEM, precision ball lenses are used as starting molds. Hemispherical shells are formed on the lenses using five major steps: (1) isotropic coating with sacrificial and shell layers, (2) stencil transfer of coated...
We present the microfabrication and initial testing of an AFM-tip like device, or nanotorch, that is capable of generating a very localized microplasma at its tip. The submicron region near its tip provides a unique manufacturing environment where new methods for controlled direct-write micro and nanofabrication can be tested. The device has been fabricated using both surface and bulk micromaching...
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