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In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the...
We have newly proposed heterogeneous multi-chip module integration technologies in which MEMS and LSI chips are mounted on Si or flexible substrates using a self-assembly method. A large numbers of chips were precisely and simultaneously self-assembled and bonded onto the substrates with high alignment accuracy of approximately 400 nm. Thick MEMS and LSI chips with a thickness of more than 100 mum...
A novel analytical solution of continuous cellular automaton (CA) is presented for the simulation of anisotropic wet etching in the fabrication of micro structures. Based on the step flow model, the atomistic characters of surface propagation and classification of the surface sites on etching front have been introduced. An analytical solution for the dependence of the etch rate on orientation is derived...
We proposed an artificial hollow fiber structure as a new material for MEMS, and applied it for realizing a novel type of fabric tactile sensor. The hollow fiber structure is fabricated from commercially available silicone rubber tube by laminating a metal and an insulation layers on the surface. The fabricated hollow fiber is 250 mum in external diameter and 40 mum in thickness. The fabric tactile...
In order to improve the reliability of Micro-electro-mechanical Systems (MEMS) designs, evaluations of the mechanical properties of soft magnetic materials are needed. In this paper, we present a tensile testing method to characterize the mechanical properties of microscale electroplated permalloy (80 wt% Ni, 20 wt% Fe) films. The gauge section of the specimen is 50 mum wide, 100 long and 5 mum thick...
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