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Periodic amorphous Si (a‐Si)/SiO2 multilayers, fabricated in a conventional plasma enhanced CVD system by alternatively changing the deposition of ultrathin a‐Si film and in‐situ plasma oxidation process, formed (nc‐Si)/SiO2 multilayers after the subsequent KrF laser‐crystallization. Stable electroluminescence (EL) can be achieved at room temperature from laser crystallized multilayers by evaporating...
Hydrogen passivated nanocrystalline Si/SiO2 (nc‐Si:H/SiO2) pillar arrays were fabricated by using nanosphere lithography combination with hydrogen plasma annealing (HPA). Enhanced blue‐orange‐red photoluminescence (PL) could be observed by the naked eye in the bright room from the samples. By controlling the size of nc‐Si:H from 3.8 to 1.8 nm, the PL peak blueshifts from 757 to 435 nm. It is found...
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