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Two different novel SAW type pressure sensing structures were manufactured using micromachining and nanolihographic processes: SAW supported on a GaN/Si (1.2 µm/ 10 µm) membrane for the first type structure and SAW supported on a 1.2 µm thin GaN membrane for the second type. The two resonance peaks observed for both structures were identified, using wave shape simulations, as Rayleigh mode and symmetric...
The paper presents the manufacturing and characterization of GaN based SAW (surface acoustic wave) type temperature sensors. In contrast with most SAW sensor structures, manufactured on classical piezoelectric materials where delay lines or two port resonators have been used, in this paper, the resonance frequency shift vs. temperature for a single resonator structure was used for temperature measurements...
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