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This paper presents for the first time the design, fabrication and characterization of a GaAs membrane supported millimeter wave receiver that monolithically integrates a Yagi-Uda antenna with a Schottky diode. The design approach includes intensive electromagnetic simulation and modeling. The fabrication processes is based on GaAs micromachining and the Schottky diode is monolithically integrated...
This paper presents the design, fabrication and "on wafer" characterization of membrane-supported Yagi-Uda CPW fed antenna structures. The antennas were designed for the 60 GHz and 77 GHz frequency operating ranges. The 60 GHz antennas were fabricated on a semi-insulating GaAs membrane using GaAs micromachining. The 77 GHz antennas were manufactured on 1.4 mum thin SiO2/Si3N4 membranes obtained...
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