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A simple numerical model for the assessment of the arc stability in AMF electrode systems is suggested. The model combines electromagnetic simulations with simplified plasma description. The plasma model prescribes the basic features of the arc column which moves in accordance with the action of the Lorentz force. Analysis of the plasma trajectory indicates the stability of the arc column considering...
This paper presents the development of a micro mechanical inverter for signal processing applications in low frequency MEMS sensors. The inverter consists of two MEMS contact switches connected in complementary configuration. The working principle of the inverter has been thoroughly explained and the design and performance analysis of the inverter have been systematically worked out using a top-down...
Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like low loss, excellent isolation etc. in the microwave frequency domain where the on-chip passives normally tend to become leakier and degrades the transceiver performance...
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. In this work, micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations have been...
This paper evaluates the performance characteristics of two tunneling accelerometers having cantilever and proof mass moving structures of similar dynamic response ranges. Design and optimization of the two structures have been carried out aiming aerospace and satellite application. Both the structures have been fabricated using surface micromachining process. Different performance parameters of the...
This paper presents the design, simulation and analysis of a digital logic inverter implemented with MEMS surface micromachining process. A detailed account of the design and analysis has been presented. Transient analysis has been performed for dynamic response of the device and inverter property has been verified.
This paper presents analysis of transient response of a MEMS cantilever based binary logic inverter. The design of the cantilever structures have been optimized with finite element method based simulation in Coventorware platform and system level simulation in Saber Architect platform. Analysis of the turn-on and turn-off time for the inverter has been attempted with analytical and numerical techniques...
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