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We develop a reconfigurable silicon photonics platform using low-loss microheater architectures integrated onto ultra-compact Si microdisk resonators. A low-power differentially tunable coupler is demonstrated with reconfiguration time below 85 ns using this platform.
Using the experimental data we show the possibility of sub-microsecond reconfiguration of silicon photonics microresonators through pulse shaping of micro-heater excitation. Also, a novel heater structure based on small microdisk resonators with sub-hundred-nanosecond reconfiguration speed is proposed and investigated theoretically.
Integration of silicon microresonators with metallic micro-heaters optimized for low power consumption and fast reconfigurability is experimentally demonstrated. It is shown that narrower heaters improve the performance and also LPCVD SiN over-cladding enhances tuning speed.
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