The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
High-index silicon substrates are proposed as an alternative for the development of a new type of microsystems. Both bulk and surface micromachining techniques could be developed in combination with MOS circuits, offering new possibilities of applications, based on a combined intra- and post-processing approach without affecting the interface atomic texture of high-index substrates. As an example...
This paper reports on the first demonstration of a gravimetric chemical sensor based on direct integration of single wall carbon nanotubes (SWNTs) grown by chemical vapor deposition (CVD) on AIN contour-mode MicroElectroMechanical (MEMS) resonators. In this first prototype the ability of SWNTs to readily adsorb volatile organic chemicals has been combined with the capability of AIN Contour-Mode MEMS...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.