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A nano-scale dual-step was made by Focused Ion Beam (FIB). The shape of the nano two-step was measured using Atom Force Microscope (AFM). The parameter values in different location of the nano dual-step are compared, including the height h, the base surface roughness Rabase, the first-step surface roughness Rastep1, the second-step surface roughness Rastep2 and the sidewall inclination θ1, θ2. It...
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