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Cu doped ZnSb based thin films were deposited by direct current magnetron co-sputtering. X-ray diffraction results show that the un-doped thin film reveals a single ZnSb phase and it transforms to Zn4Sb3 phase after Cu doped. The material with Zn4Sb3 phase which belongs to R-3c space group crystal will lead to lower thermal conductivity. The Hall effect measurement shows that the samples are P-type...
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