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Structural and surface properties of diamond-like carbon (DLC) clusters deposited by pulsed ArF laser deposition on Si wafers, a-Si:H, and glass substrates are described. It was found that DLC films deposited in H 2 ambient have a faceted morphology even at room temperature. Separated G (graphite) and D (disordered) Raman bands appeared for films deposited at high temperature (>300 ...
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