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To reduce cross coupling in the control of multi-input multi-output (MIMO) motion systems having diagonal dominance, a dynamic decoupling design is studied. The dynamic decoupling is used in parallel to a nominal (and static) decoupling with the aim to support a straight-forward single-input single-output (SISO) control design. For a six degrees-of-freedom nano-accurate wafer stage, the off-diagonal...
Recent results on the control of linear systems subject to time-domain constraints could only handle the case of closed-loop poles that are situated on the real axis. As most closed-loop systems in practice contain also complex poles, there is a strong need for a general framework encompassing all cases. In this paper such a framework is presented based on sums-of-squares techniques and we show indeed...
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