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Infrared reflection absorption spectroscopy that used buried metal layer substrates (BML-IRRAS) and density functional cluster calculations were employed to investigate the water related oxidation reactions of 2H+H 2 O/Si(100)-(2×1), 2D+H 2 O/Si(100)-(2×1), and H 2 O+H/Si(100)-(2×1). In addition to the oxygen inserted coupled monohydrides, which were previously reported in...
The water adsorption on the bare and H-terminated Si(100) surfaces has been studied by the BML-IRRAS technique. It is found that H-terminated surfaces are much less reactive compared to the bare silicon surfaces. The (1×1)-H and (3×1)-H surfaces show similar and less reactivity pattern compared to the (2×1)-H surface. At higher exposures, the water reaction with coupled monohydride species provides...
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