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This study reports a novel packaging technique using the polymer cover. The polymer cover with built-in flexible connectors is mechanically interlocked to Si-substrate with built-in socket arrays. These components are realized using microfabrication processes and further integrated with MEMS-device chip. The shapes of socket/connector are easily patterned using processes. The typical interlocking...
In this letter, the concept of driving tunable solid lens using microthermal actuator is presented. This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness between PDMS and silicon will lead to the deformation of polymer lens during heating, so as to further change...
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