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This study reports a novel packaging technique using the polymer cover. The polymer cover with built-in flexible connectors is mechanically interlocked to Si-substrate with built-in socket arrays. These components are realized using microfabrication processes and further integrated with MEMS-device chip. The shapes of socket/connector are easily patterned using processes. The typical interlocking...
A novel astigmatism-tunable microlens is reported in this letter. This device is based on a thermal-actuated current-controlled tunable polymer lens. The thermal deformation as well as surface profile of polymer lens is tuned by temperature using the current induced Joule heating. The asymmetric boundary condition is further applied on the silicon conducting ring of the lens to invoke asymmetric deformation...
A novel astigmatism-tunable micro lens is reported in this paper. The device is based on a thermal-actuated tunable lens. Asymmetric boundary condition is further introduced on silicon conducting ring of lens to invoke asymmetric deformation of polymer lens as well as astigmatic change of PDMS-lens. The astigmatism is easily controlled via driving current. This study demonstrates the astigmatism variation...
A miniaturized tunable dispersive optical system is presented, which consisted of a novel tunable vertical grating operated in the visible. Preliminary results for fabricating and testing such device are also conducted to prove the feasibility
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