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This paper reported a miniaturized sensitive gravimetric gas sensor based on film bulk acoustic resonator (FBAR). The sensitivity of the FBAR gas sensor was enhanced 10∼20 times after coating with nanomaterials (metal organic frameworks (MOFs)). A facile coating process of MOFs on FBARs was disclosed for the first time. Furthermore, utilizing FBAR sensors as detectors was firstly demonstrated in a...
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