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CMOS-MEMS probes have the ability to interact with external surfaces mechanically and electrically through their conductive tips. Using only the electrothermal actuator of the probe, micro-Newton forces can be applied to make active probe contact with a conductive substrate. Measured cyclic contact resistance has a mean value of 7.4 kΩ and a standard deviation of 11.3 kΩ over 2450 cycles. When the...
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