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A new multi degree-of-freedom (multi-DOF) ultrasonic motor using in-plane deformation of PZT elements is proposed in this paper. The stator of the motor consists of a hollow metal cylinder, whose outside surfaces are flattened on four sides at 90 degrees to each other. Four rectangular PZT plates polarized in thickness direction are bonded on them. By using the deformation of PZT plates in the plane...
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