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Transparent conductors such as indium tin oxide (ITO) are used in a range of optoelectronic devices. Such materials provide both the electrical interface with the semiconductor and a transparent window for the injection or extraction of photons. In AlGaInP surface emitting LED device structures, a particular problem is that of providing an efficient current spreading layer in order to ensure that...
The effects of post-deposition annealing in different atmospheres, on electrical and optical properties of sputtered and thermally evaporated indium tin oxide (ITO) films have been investigated. Significant variations in resistivity, mobility, carrier concentration and transparency were observed. X-ray diffraction patterns (XRD) and scanning electron microscopy (SEM) showed changes in the film grain...
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