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Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600°C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded...
ZnO films with different inclined angles on steel substrates were sputter-deposited by changing the substrate tilt angle during deposition and then used to fabricate ZnO film ultrasonic transducers. The ultrasonic performance of those devices was characterized using a standard pulse-echo method. A dual mode wave with both longitudinal and shear wave components was detected from the ZnO device at 0°...
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