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A novel optical MEMS pressure sensor with a SU-8 microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry–Pérot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed...
The optical MEMS pressure sensor with a planar and mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) interference and the relation between deflection and pressure is analyzed. The fabrication of each diaphragm is described. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting...
An optical MEMS pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm...
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