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This paper describes an investigation of double-layer anti-reflection (DLAR) coatings with MgF 2 and CeO 2 films. We obtained CeO 2 films with a refractive index between 2.3 and 2.4, a surface state density of approximately 10 11 eV -1 cm -2 , and a similar lattice mismatch to silicon substrate. The CeO 2 film grown at 400 ...
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