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Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process...
This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO2/SiO2 structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction...
In this paper, a novel piezoelectric film based ultrasonic microspeaker array is proposed. The SiO2/Pt/Pb(Zr,Ti)O3 /Pt/Ti/SiO2 multimorph structure has been designed and fabricated using silicon based micro-machining process. The membrane size of the single transducer cell is 1000times1000times2.5 mum 3, and the main resonance frequency is located near 68kHz. The performance of directivity is a very...
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