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Realizing a low temperature annealing process for next-generation, transparent, and flexible displays is necessary. Here, we annealed the channel at different conditions: ultraviolet (UV), ozone (O3), wet oxygen (Wet O2), and a combination of the two: UV & O3, UV & Wet O2. Results show that dry ambient UV & O3 annealing at 150°C has higher mobility (0.36 cm2/Vs) and decent subthreshold...
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