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In this paper, we report the design, simulation and optimization of a novel polymeric out-of-plane electro-thermal micro-actuator. The electro-thermal micro-actuator consists of tri-layers: the passive Ni layer, an expanding SU-8 layer and a curling S-shaped Ni heater. The tri-layer actuator is accompanied with a suspended structure to produce an out-of-plane movement perpendicular to the substrate,...
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