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A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based...
Quality factors as high as 362,768 have been measured for 61-MHz polysilicon wine-glass disk micromechanical resonators operated at cryogenic temperatures down to 5K. The measured results not only represent a ~2.5times increase in Q over the room temperature value, equivalent to a nearly 10-dB improvement in phase noise; but also provide some limited insight into the intrinsic material damping and...
A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single...
The resonance and nonlinear dynamical properties of micromechanical structures have been harnessed to demonstrate an impacting micromechanical switch with substantially higher switching speed, better reliability (even under hot switching), and lower actuation voltage, all by substantial factors, over conventional RF MEMS switches. The particular resoswitch implementation demonstrated in this work...
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