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An oxidation enhanced mechanical polishing technique of CVD diamond films has been developed in order to expand its industrial applications. Although numerous machining methods [David G. Jeng, H.S. Tuan, Appl. Phys. Lett. vol.56 (No.20) (May 1990) p. 1968] were explored for years, including mechanical polishing, thermal chemical polishing, plasma etching, excimer laser etching, and ion beam polishing,...
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