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Capacitance sensors, that report the values of capacitances as digital codes, are important in such areas as biomedical, environmental, and mobile applications. Voltage sensors are also widely used in many modern application areas, e.g. where battery life information is important. Conventional capacitance sensing methods use complex ADC techniques that are power hungry, and existing digital solutions,...
This paper reviews recent progress on CMOS-integrated optical receivers for on-chip interconnects, which have become attractive for achieving communication bandwidth well beyond terabit-per-second with low-power consumption. The design of optical receivers and the performance metrics required from the photodetector (PD) for a low-power receiver is discussed. The progress in waveguide-integrated germanium...
Interconnect process features are described for a 32 nm high performance logic technology. Lower-k, yet highly manufacturable, carbon-doped oxide (CDO) dielectric layers are introduced on this technology at three layers to address the demand for ever lower metal line capacitance. The pitches have been aggressively scaled to meet the expectation for density, and the metal resistance and electromigration...
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