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Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90° are proposed to boost the quality factor (${Q}$ ) of Lamb wave resonators (LWRs) thanks to the elimination of the anchor loss. Finite-element method simulation shows that the butterfly-shaped plate can efficiently reduce mechanical energy leakage via the supporting anchors and accordingly enhance the mechanical...
The use of butterfly-shaped thin plates, formed by reducing the tether-to-plate angle, can raised the quality factor (Q) of aluminum nitride (AlN) Lamb wave resonators (LWRs) by eliminating the anchor loss. The finite element analysis (FEA) simulation results show that the butterfly-shaped plate can efficiently keep the vibration far from the edges at the tether-to-plate plane, so that the acoustic...
A novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an aluminum nitride (AlN) plate formed in a butterfly shape is investigated in this paper. In the conventional design, the Q's of the micromachined Lamb wave resonators are largely harmed by the energy dissipation through the support tethers. The finite element analysis (FEA) simulation results show that the butterfly-shaped...
In this study the characterization of an aluminum nitride (AlN) double ended tuning fork (DETF) fabricated on a layer of silicon dioxide (SiO2) is presented. The positive temperature coefficients of SiO2 are used to achieve zero TCF for radio frequency (RF) Lamb wave resonators. This paper shows the possibility to integrate temperature compensated Lamb wave resonators with DETF-based devices on a...
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