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A novel approach to the boost quality factor (Q) of Lamb wave resonators by chamfering the aluminum nitride (AlN) plate is investigated for the first time. It is well-known that the Q's of the AlN Lamb wave resonators are degraded due to energy dissipation through the support tethers. In this work, similar to the beveled edges used in AT-cut quartz resonators, the chamfered corners are utilized to...
A novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an aluminum nitride (AlN) plate formed in a butterfly shape is investigated in this paper. In the conventional design, the Q's of the micromachined Lamb wave resonators are largely harmed by the energy dissipation through the support tethers. The finite element analysis (FEA) simulation results show that the butterfly-shaped...
Acoustic energy leakage through support tethers into the substrate, known as anchor loss, decreases the quality factors (Q) of micromechanical aluminum nitride (AlN) Lamb wave resonators. In this work, we present a theoretical study on the anchor loss of the AlN Lamb wave resonators by using the perfect matched layer (PML) approach in the finite element analysis (FEA) simulation. The anchor loss Q's...
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