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Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90° are proposed to boost the quality factor (${Q}$ ) of Lamb wave resonators (LWRs) thanks to the elimination of the anchor loss. Finite-element method simulation shows that the butterfly-shaped plate can efficiently reduce mechanical energy leakage via the supporting anchors and accordingly enhance the mechanical...
Type I Lamb wave modes exhibit a strong affinity toward multimode behavior, especially the high-transduction-efficiency modes: S0 and S1 mode. Apodization, the standard technique to suppress the transverse modes for IDT-excited resonators, suffers from drawbacks such as additional loss and reduction of the effective coupling coefficient (k2eff). Most Lamb wave modes in AlN show a positive slope in...
A novel approach to the boost quality factor (Q) of Lamb wave resonators by chamfering the aluminum nitride (AlN) plate is investigated for the first time. It is well-known that the Q's of the AlN Lamb wave resonators are degraded due to energy dissipation through the support tethers. In this work, similar to the beveled edges used in AT-cut quartz resonators, the chamfered corners are utilized to...
Acoustic energy leakage through support tethers into the substrate, known as anchor loss, decreases the quality factors (Q) of micromechanical aluminum nitride (AlN) Lamb wave resonators. In this work, we present a theoretical study on the anchor loss of the AlN Lamb wave resonators by using the perfect matched layer (PML) approach in the finite element analysis (FEA) simulation. The anchor loss Q's...
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