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Diffusion-limited deposition (DLD) allows the deposition of parylene C layers of two different thicknesses in one step with smooth transitions in between. Needlelike microelectrode structures for implantation in the brain were successfully coated with a taper along the needles' shafts. Diffusion limitation was obtained in the parylene coater by containers with perforated cover lids through which the...
This paper reports on a novel type of silicon- based microprobes with linear, two and three dimensional (3D) distribution of their recording sites. The microprobes comprise either single shafts, combs with multiple shafts or 3D arrays combining two combs with 9, 36 or 72 recording sites, respectively. The electrical interconnection of the probes is achieved through highly flexible polyimide ribbon...
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