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This paper reports on the novel approach of using magnetic shape memory (MSM) alloys as smart materials in mechanical sensing. The presented concept enables the measurement of tensile stress. The underlying sensor mechanism is based on the reorientation of the martensitic variants of the tetragonal unit cell of the MSM alloy which can be induced by either a magnetic field or a mechanical stress. In...
This paper reports on a novel application for an array of 32×32 field-effect transistors (FETs) each equipped with four source/drain contact. When the FETs are operated as Hall sensors, the array can be used in a high-precision, three-dimensional micro-positioning device by resolving the spatial distribution of magnetic flux densities. Lateral and out-of-plane resolutions (2σ) of 3.6μm and 16μm, respectively,...
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