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Epitaxial yttria-stabilised zirconia films have been prepared on (1-1,0,2) sapphire substrates by pulsed injection MOCVD. The structure and the degree of in-plane and out-of-plane texture of the layers has been characterised by X-ray diffraction as a function of deposition temperature and film thickness. The layers have been found to be preferentially <001> oriented with a high degree of epitaxy,...
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