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We demonstrate a bilayer passivation method using a Teflon and SiO 2 combination layer to improve the electrical reliability of pentacene-based organic thin-film transistors (OTFTs). The Teflon was deposited as a buffer layer using a thermal evaporator that exhibited good compatibility with the underlying pentacene channel layer, and can effectively protect the OTFTs from plasma damage during...
This study proposes an alternative planar bottom-contact (pBC) structure to enhance the electrical performance of pentacene-based organic thin-film transistors (OTFTs). This pBC structure uses a bilayer dielectric to control planarization with a precise etch depth and introduces a bilayer photoresist lift-off method to ensure that planarization produces an optimum flatness. Because of the improved...
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