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Focusing on the challenges of wafer fabs with multiple tools and high-mix products, this study aims to propose a decision-based virtual metrology framework to reduce the metrology cost and enhance productivity. An empirical study was conducted in a leading semiconductor company in Taiwan to validate the effectiveness of proposed approach for controlling overlay errors in lithography processes while...
As semiconductor manufacturing reaching nanotechnology, to obtain high resolution and alignment accuracy via minimizing overlay errors within the tolerance is crucial. To address the needs of changing production and process conditions, this study aims to propose a novel dynamically adjusted proportional-integral (DAPI) run-to-run (R2R) controller to adapt equipment parameters to enhance the overlay...
Every enterprise is pursuing energy conservation and carbon reduction development. Under this trend, light-emitting diodes (LEDs) are becoming the focus of the lighting industry. Because of the different levels or types of chips and substrates, the characteristics of products will be different. LED products are categorized according to characteristics such as luminescence efficiency, wavelength (color),...
• Through the proposed method, the streamlined high-priority lots can be obtained with maximum information coverage and best KPI, and the model has good ability of abnormal discrimination. • Cost reduction by catching more abnormal events • Decreasing business impact to improve customer's satisfaction
The discipline of industrial engineering has been declining in many countries in light of the changes of industry structures in developed countries, in which the competition is no longer among individual companies while the collaboration among horizontally specialized value providers are critical for the success of the individual companies as well as the whole supply chain. There should be a systematic...
Statement of Financial Accounting Standards (SFAS) No.10 has been declared as accounting principle for allowance for reduction of inventory to market in Taiwan since December 31, 2008. It has become more difficult for semiconductor integrated device manufacturers, using make-to-stock manufacturing strategy and possessing inventory accounting for about 14% total costs, to maintain robust records in...
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