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Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios...
This paper considers a semiconductor manufacturing scheduling problem (SMSP), subjected to all the practical constraints such as limited waiting time, machine status, different process time on different machines, setup time and arrival time in wafer fabrication facilities (fabs) of semiconductor manufacturing industry. A hybrid estimation of distribution algorithm with multiple subpopulations (HEDA-MS)...
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