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In this paper we study the impact of two sacrificial layers on the final residual stress of thin gold films. In particular, we compare a typical photoresist layer (Shipley SC1827) to single-crystalline silicon. We fabricate and measure cantilever beams on both sacrificial layers and study their residual stresses by analyzing the final displacement profile of the released beams. All samples were fabricated...
We present complex refractive index measurements of Pd and Pt films from 700-1700 nm using variable angle spectroscopic ellipsometry. Refractive index changes upon H2 gas adsorption were determined by measuring normal incidence reflection and transmission.
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