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Two erbium compound films, Er2SiO5 and Er2O3 were fabricated by sol-gel method using two kinds of starting sol solutions, respectively, and corresponding structure and photoluminescence properties were studied.
Well-ordered Er2SiO5 silicates with a fast decay (~10~50mus) of the 1.53mum emission was obtained on Si by sol-ge1. In contrast, Er silicates on SiO2/Si showed different luminescence spectra with a slow fluorescence decay (tau > 100mus).
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