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An air-filled long slot leaky-wave antenna (LWA) based on folded half-mode waveguide (FHMW) fabricated using silicon substrate is proposed for millimeter-wave application. As is well known, the high-permittivity silicon dielectric is not suitable for antenna design. Thanks to the through-wafer dry etching and gold-plating processes deriving from the silicon bulk micromachining technology, three purely...
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