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The effect of TaO capping layer on microstructures and magnetic properties of FePt thin films via annealing was studied. The structural ordering of FePt from face-centered cubic to face-centered tetragonal phases depends strongly on the oxygen contents in the capping TaO layer. The role of the TaO layer is used to separate the FePt grains, as revealed by TEM. The annealed FePt/TaO...
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