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This paper reports the fabrication of a piezoresistive microcantilever biosensor using a unique two-step front-side releasing method, which combines anisotropic etching and isotropic etching. The microcantilever sensors are fabricated on single crystalline SOI wafers to exploit the high piezoresistive coefficients. The anisotropic etching exposes the sidewalls beneath the microcantilevers, and the...
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