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A 30 µg/sqrt(Hz) resolution MEMS based low-g 3-axis accelerometers targeted for emerging automotive application is presented. The device is composed by 2-dice in a single package: the sensing element and the processing IC. The sensing element is realized with an epitaxial micro-machining process (ThELMA™) while the IC uses a 0.5 μm BICMOS process. The IC amplifier is able to detect capacitive changes...
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