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The SU-8 photopolymer is an excellent alternative for traditional materials used in fluidic devices such as glass- or silicon-based inorganic materials. We describe a new chemically-anchored, lithographically-patterned hydrogel sensing element embedded in a completed SU-8 fluidic channel structure after the channel bonding process. Polyethylene glycol (PEG) hydrogel films incorporating oxygen-responsive...
A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition...
Formation of the biorecognition layers within microfluidic sensor channels must be done after the completion of the channel structure since these layers cannot withstand the wafer bonding temperature. We propose a new post-bonding immobilization process to prepare the enzyme layers within microfluidic channels of electrochemical biosensors. An array of Pt vertical electrodes is electroplated using...
Due to the high flexibility and versatility in the process development of microfluidic devices, an epoxy-based, high-aspect ratio photoresist SU-8 is now attracting attention as the main structuring material of the fluidic channels. Manipulation of the surface properties of SU-8 channel wall is critical to attach functional films such as enzyme-immobilized layers or biocompatible layers. We describe...
The objective of this work is to develop a new microsensor system that can monitor dissolved oxygen and hydration environment at the plant root zone. A miniaturized plant growth system is prepared including the root zone layer, either a porous ceramic tube or porous ceramic wafer on which the plant is grown, and an underlying fluidic channel to deliver nutrients and water to the root zone. We demonstrate...
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