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Multiphase Ti(C, O, N)/a-C:H thin film was synthesized by reactive magnetron sputtering of TiC in controlled CH4, O2 and N2 media. The resultant chemical structure and composition of this complex phase are governed by the substrate temperature. At a lower substrate temperature of 40°C, hydrogenated amorphous carbon (a-C:H) with defected aromatic sp2 domains was dominated with titanium oxide and titanium...
TiC/a-C nanocomposite films were deposited by rf magnetron sputtering on silicon substrates. A thin Cr inter-layer was interposed to enhance the interfacial adhesive strength. At a low deposition power of 25W, the formation of TiC phase with (200) orientation was observed. Cross sectional scanning electron microscopy (SEM) image of this film showed growth with columnar microstructure. However, at...
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