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Rectangular piezoresistive cantilevers with stress concentration holes opened were designed and fabricated in order to increase the response signals of piezoresistive cantilever first. Both the simulations and the measurements on the cantilever sensitivity show that this design can obviously result in an improvement on the displacement sensitivity of the piezoresistive cantilever. After a characterization...
This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a...
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