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With the development of microfabrication, micropatterns attract more and more attentions in cellular biology research. However, fabrication of micron annulus patterns with feature size of several micrometers by the traditional lift-off technique is still tricky. In this work, an aluminum-photoresist dual-layer lift-off process was developed to achieve a high yield and good reproducible gold micropattern...
A novel Parylene-based shape-transferring technique was developed to fabricate 3-D microelectrodes, which fulfilled the requirements of the high-density microelectrode array (MEA) used in retinal prosthesis. A process combining anisotropic and isotropic etching was utilized to form the 3-D silicon-tip array whose shape was transferred to the Parylene C film as a flexible and biocompatible substrate...
This paper describes a new three-dimension (3D) flexible parylene-based microelectrode array (MEA) developed for functional electrical stimulation in neural prosthesis. These arrays with 3D tip profile and gold surface were microfabricated employing a parylene-based pattern transfer technique. Silicon tip array was etched by the HNA etchant and covered with parylene hereafter. Metallization on this...
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