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This paper presents optimum design of circular membrane for high quality factor. A quality factor of CMUT, we designed for resonant chemical sensor, is dominated by Qair and Qsupport. We investigated these two factors independently. We calculate Qair of circular silicon membrane analytically, and numerically. Calculated Qair is compared to measured value. In order to find Qsupport empirically, we...
We investigated the effects of electrically connecting multiple microresonators on the frequency noise with a goal to improve the resolution of a chemical sensor based on the capacitive micromachined ultrasonic transducer (CMUT) technology. We fabricated twenty-two 50-MHz CMUTs with varying number of cells and measured the input impedance characteristics. The impedance measurement results show a linear...
We present an 18-MHz capacitive micromachined ultrasonic transducer (CMUT), used as a chemical sensor for detection of a common simulant for chemical weapons, dimethyl methylphosphonate (DMMP), in air. CMUTs are attractive for chemical sensor applications because of their unprecedented mass sensitivity per membrane area, low motional impedance, and high quality factor compared to other flexural-mode...
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