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Experimental results on nanocomposite TiN/Cu and TiN/Si thin films by ion beam and plasma based sputtering processes are presented in this paper. Films were deposited on silicon (100) wafers not only by ion beam assisted sputtering deposition, in which the sputtered Ti and Cu and/or Si were deposited with simultaneous bombardment of nitrogen ions with different ion density, but also by d.c. magnetron...
Titanium boron nitride coatings were synthesized by ion beam assisted sputter deposition. Structural analysis showed that the coatings had a composite structure comprising nanosized TiB 2 /TiN crystallites and a thin layer matrix of hexagonal BN. Although, the hardness of these Ti-B-N coatings was generally lower than that of pure TiB 2 , improved anti-wear performance was observed...
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