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This paper describes the application of the developed fast-scanning laser probe system to the diagnosis of frequency dependence of lateral energy leakage occurring in RF BAW devices. According to wavenumber domain analyses, dispersion relation for the device under test is derived, the leakage behaviors at different frequencies are shown as images, and energy of each lateral mode is evaluated quantitatively...
The paper describes the development of an integrated software environment for the image processing of complex data captured by phase-sensitive SAW/BAW laser probe system. By the software using graphical user interface, efficient diagnosis of SAW/BAW devices is made possible. The developed software displays the amplitude and phase images of acquired results, and a motion movie of the field pattern...
This paper describes a circuit model for the analysis of nonlinearity in the filters based on radio- frequency (RF) bulk acoustic wave (BAW) resonators. The nonlinear output is expressed by a current source connected parallel to the linear resonator. Amplitude of the nonlinear current source is programmed proportional to the product of linear currents flowing in the resonator. Thus, the nonlinear...
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